Year. Month, date

Patent Name

 Status( Patent Pending , Registration, sanction)

Publishing office

 1999.06.27

    Baffle of continuous refrigerant   circulation type diffusion pump

Patent no. 0225323

  The Office of Patent Administration

 2000.05.04

  Bubbler for semiconductor production

 Patent no. 0363063

  The Office of Patent Administration

 2005.05.04

  Wafer heating device

 Patent no. 0363062

  The Office of Patent Administration

 2000.12.29

   Automatic wafer transfer system for multi chamber semiconductor fabrication equipment

 Patent no. 0388307

  The Office of Patent Administration

 2000.10.26

   Automatic wafer transfer system for    semiconductor fabrication equipment

 License no. 0219127

  The Office of Patent Administration